The main contents and results are listed as follows : with the help of opfcad software , anti - reflective and protective films of sio2 and sio2 / si are designed on the sapphire substrate and analysis of structure sensitive factor and variation are done 主要研究成果如下:利用opfcad软件在蓝宝石衬底上设计了sio _ 2 、 sio _ 2 si等增透保护膜系,并对所设计的膜系进行了结构敏感因子( n , d )及结构偏差分析。